|
|
|
|
|
RORZE offers both atmospheric and Vacuum Robots and substrate handling products to the industy. Rorze has already an installed base for leading edge products for the 450mm platform, EUV substrate handling and Custom cluster for High Throughput Screening applications
|
Isolated Drive Mechanism
Contamination Control (Clean)
- Complete isolation of rack and drive mechanism through Patented magnetic coupling drive! There is no influence of temperature / humidity.
- Can easily remove the turntable for cleaning and sample storage and handling
.
|
|
|