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RORZE offers both atmospheric and Vacuum Robots and substrate handling products to the industy. Rorze has already an installed base for leading edge products for the 450mm platform, EUV substrate handling and Custom cluster for High Throughput Screening applications
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Robot Lineup
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Different Robots for different purposes and environments :
Robot with a minimum rotation radius, maximum transfer distance, thin gate opening, and small form factor.
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MUSASHI Series
Dual-axial DD Motor, Frog-Leg Linked-Arm,
Transfer with high precision, Long reach |
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RR470 Series
Boomerang Arm, Feed-through Robot,
Long reach, Transfer to thin gate opening |
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Tri-axial DD Robot Series
Tri-axial DD Motor, Linked Arm,
Non-rubber-belt structure, Long reach,
Transfer to thin gate opening |
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